We investigate solid surfaces and interfaces at atomic level in order to create surfaces and interfaces with various functions. We have developed several original techniques for surface analysis, such as correlated thermal diffused scattering (CTDS) and Weissenberg reflection high energy electron diffraction (WRHEED). In order to study reaction and phase transition dynamics, we have developed a new method called streak camera reflection high energy electron diffraction (SC-RHEED), which captures high-speed movement of surface atoms. Photoelectron microscopy (PEEM) and scanning electron microscopy (SEM) are also used to measure non-uniform material surfaces at the nano meter scale.